Versatile SIMS Tool: Reference Detection Sensitivity with High Throughput & Full Automation
The IMS 7f-Auto is the latest version of our successful IMS xf Secondary Ion Mass Spectrometer (SIMS) product line. Designed to deliver high precision elemental and isotopic analyses with increased ease-of-use and productivity, it has been optimized for challenging applications such as glass, metals, ceramics, Si-based, III-V and II-VI devices, bulk materials, thin films… fulfilling industry requirements for efficient device development and process control.