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Gas Cluster Ion Source (GCIS): Minibeam 6

May 30, 2024 by

Multi-mode ion source for organic and inorganic sputter depth profiling

The multi-mode gas cluster ion source is designed to operate in both Arn+ cluster and Ar+ monatomic modes making it suitable for sputter cleaning and depth profiling organic, inorganic and metallic thin films. In addition it may also be used to generate low energy He+ ions for use with ion scattering spectroscopy.

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Edge Scientific provides researchers and facilities with the expertise and equipment to customize their systems by integrating product lines for nanotechnology applications. Our approach is comprehensive. We assess the needs of our customers to develop complete application solutions for proposal submissions. We also employ application specialists with the expertise to ensure optimization of the systems we support.

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