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Prober Shuttle (PS8)

October 23, 2019 by

The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing on the 7 nm technology node – and beyond! In order to realize our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision – the MM4. The Prober Shuttle can be comprised of up to eight MM4s with the option of an ultra-flat two-axis or three-axis substage.

The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others.

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Edge Scientific

Edge Scientific provides researchers and facilities with the expertise and equipment to customize their systems by integrating product lines for nanotechnology applications. Our approach is comprehensive. We assess the needs of our customers to develop complete application solutions for proposal submissions. We also employ application specialists with the expertise to ensure optimization of the systems we support.

Edge Scientific – Leading nanotechnology solutions.

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