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SIMS AKONIS

October 3, 2020 by

Fully automated SIMS for compositional measurement in the semiconductor fab

The AKONIS SIMS tool fills a critical gap in semiconductor fabrication processes by providing high throughput, high precision detection for implant profiles, composition analysis and interfacial data directly in the semiconductor manufacturing line. AKONIS offers a very high level of automation to ensure repeatability across tools for fab level process control and tool-to-tool matching.

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