82mm Annular Targets

Annular sputter targets are used on the older Polaron sputter coaters and on the Anatech/Technics Hummer sputter coaters. For the annular targets, the target material is attached to an aluminum support ring and they are supplied as complete assemblies. Available as targets with pure gold, gold/palladium, platinum, platinum/palladium, silver, copper and nickel. There are two sizes offered:

– Ø82mm OD x Ø60mm ID annular type high purity EM-Tec sputter targets for sputter coaters