HS-100MG AFM XYZ calibration standard, 100nm Z, mounted on 12mm AFM disc

Description

The HS-100MG is predominantly a height calibration standard with a 100nm calibrated height. It consists of silicon dioxide structures on a 5x5mm silicon chip. The fabrication process guarantees excellent uniformity of the structures across the chip. The calibration area is located in the centre of the silicon chip and consists of a larger square of 1x1mm with square pillars and holes with a 10µm pitch. In the centre of this square resides a smaller square of 500×500µm with circular pillars and holes with a 5µm pitch.

This design also allows for X- / Y-axis calibration for biggers scanners in the 10-40µm range. The structure symmetry of the HS-100MG enables calibrating your AFM system in one step without rotating the sample in between X- and Y-axis calibration. The HS-100MG is mounted on a 12mm metal AFM disc using electrically conductive epoxy resin. The exact height value is stated on the label of the HS-100MG.