Description
The Micro-Tec MTC-5 brigth field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5 has been designed for calibrating reflective ligth microscopes, stereo microscopes, optical quality control systems and low magnification SEM imaging. The Micro-Tec MTC-5 incorporates four distinct patterns:
Circle patterns from 10µm to 5mm diameter
Square patterns from 10×10µm to 5x5mm
Hexagon patterns from 10µm to 5mm across
Cross scale patterns of 5x5mm with 0.01mm divisions
The four chromium deposited patterns all in the same focus plane and provide a more superior signal compared to etched patterns. The Micro-Tec MTC-5 is a NIST traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard.
