Description
The MTCD-5 dark field multiple target calibration standard comprised four inverted patterns; chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and low magnification SEM imaging. The large chromium coated are can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications. Patterns are: Inverted circle patterns from 10µm to 5mm diameter Inverted square patterns from 10×10µm to 5x5mm Inverted hexagon patterns from 10µm to 5mm across Inverted cross scale patterns of 5x5mm with 0.01mm divisions. The four chromium deposited patterns all in the same focus plane and provide more a superior signal compared to etched patterns. The Micro-Tec MTC-5 is a NIST traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard
