Description
Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, Dark Field
The MTCD-5 dark field multiple target calibration standard comprised four inverted patterns; chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and low magnification SEM imaging. The large chromium coated are can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications. Patterns are:
Inverted circle patterns from 10µm to 5mm diameter
Inverted square patterns from 10×10µm to 5x5mm
Inverted hexagon patterns from 10µm to 5mm across
Inverted cross scale patterns of 5x5mm with 0.01mm divisions.
The Micro-Tec MTCD-5 is a NIST traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTCD-5 dark field multiple target calibration standard.
