Introduction

The EM-Tec wafer holders are specially designed to hold semi-conductor wafer in sizes of 51mm, 76mm, 100mm, 150mm and 200mm diameter (2 inch, 3inch, 4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers. Made from vacuum compatible aluminium and self-lubricating brass.

Unique features of the EM-Tec wafer holders:

1. low profile, weight balanced support disc
2. square cut-outs for wafer tweezers
3. adjustable spring tension
4. adjustable for non-standard wafers
5. self-lubricating locking slide
6. compatible with either wafers with a notch or wafers with a flat
7. compatible with EM-Tec stage adapters for all SEM platforms

Available with:

• standard pin to fit on SEMs which use the standard pin; FEI, Philips, Zeiss, LEO, Leica, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, CamScan, ETEC and Novascan SEMs.
• M4 threaded hole; compatible with Hitachi SEMs, FESEMs and table top SEMs and with the EM-Tec versatile SEM stage adapters
• Ø14mm JEOL stub compatible with JEOL and EM-Tec stage adapters with a Ø14mm connection