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The IMS 1300-HR³ is a large geometry ion microprobe delivering unequalled analytical performance for a wide range of geoscience applications: tracking geological processes using stable isotopes, dating minerals, determining the presence and distribution of trace elements. Its high sensitivity and high lateral resolution also make it the tool of choice to search and measure uranium particles for nuclear safeguards purposes.
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The AKONIS SIMS tool fills a critical gap in semiconductor fabrication processes by providing high throughput, high precision detection for implant profiles, composition analysis and interfacial data directly in the semiconductor manufacturing line. AKONIS offers a very high level of automation to ensure repeatability across tools for fab level process control and tool-to-tool matching.
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The CAMECA SIMS 4550 offers extended capabilities for ultra shallow depth profiling, trace element and composition measurements of thin layers in Si, high-k, SiGe and other compound materials such as III-V for optical devices.
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CAMECA’s EX-300 is a unique LEXES based metrology tool supporting major semiconductor developments since the 90nm node era and following up the integration of the most diverse materials. It accelerates the time-to-market of your logic and memory devices and increases the integrated yield of your high volume production.
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Since pioneering Electron Probe MicroAnalysis in the 1950’s CAMECA has released several generations of microprobes, all with a proven valuable track record for analytical performance and reliability. The new SXFive-TACTIS builds on this legacy to deliver enhanced imaging and quantitative analysis performance in a user-friendly environment.
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SKAPHIA provides a safe environment for manipulating and analyzing nuclear samples together with benchmark analytical performance allowing scientists to gain a deeper understanding of fuel performance, to explore irradiated material behaviour and radiation damage processes, to develop innovative alloys and structural materials, to optimize the nuclear fuel cycle and to achieve better nuclear waste management…
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The LEAP 5000 is CAMECA’s cutting-edge atom probe microscope, offering superior detection efficiency across a wide variety of metals, semiconductors and insulators: more than 40% extra atoms detected per nm3 analyzed.
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Building on 30 years of success in Atom Probe Tomography instrumentation and application, CAMECA has developed EIKOS™, the Atom Probe microscope for rapid alloy development and nanoscale materials research.
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Gigatome Polycut-Legacy
Large scale fully automated heavy-duty sledge microtome for histology and material sciences.
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Laser-Based Sample Preparation for Microstructure Diagnostics.
The microPREP™ PRO system was developed to provide efficient laser sample preparation fitted to the needs of microstructure diagnostics and failure diagnostics. Therefore, with microPREP™ PRO material samples can be prepared effectively and economically by using an ultra-short pulse laser.
microPREP™ PRO allows to create complex and 3D-shaped samples to enable more comprehensive analysis of certain structures like in advanced packages, such as through silicon vias (TSVs), or even complete systems-in-package (SiP).
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To meet the demands of viewing TEM holders using gas and liquid samples, we like to introduce the Chiaro to perform functions of leak check, E-Chips, hydrophilize sample surfaces and plasma clean.
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The MCA, a portable downstream plasma center for ex-situ specimen cleaning and in-situ e-beam chamber cleaning, employs ibss signature GV10x fitted into one convenient, wheeled S/S enclosure.
The MCA offers effective and reliable atomic radical ashing without sputtering or heat. The Asher is controlled by the latest ibss software installed on a Windows tablet or PC. For ex-situ sample cleaning and storage, the MCA includes a streamlined Cubic Chamber flexible enough to accommodate up to three TEM holders simultaneously. The MCA source is fitted with Qwk-SwitchTM Source mounting to facilitate Source transfer from the MCA to e-beam chambers.
The MCA prevents high resolution image degradation from SEM and TEM chamber contamination build-up in the gas phase and on chamber surfaces. For expeditious and uncomplicated hydrocarbon free samples and e-beam chambers, the Mobile Cubic DS Asher is an indispensable, cost-effective asset with ROI that can be less than six months.
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Acknowledged as the appropriate knife angle for routine sectioning of both biological and materials research specimens, it represents a balanced compromise between section quality and durability.
For the sectioning of a number of hard materials such as ceramics, semiconductors, oxides etc, with the use of the ultra 45° knife a longer service time may be expected. Kindly contact us and make use of our long years experience in all ultramicrotomy applications.
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The Anti Curtaining Table is a four-axis positioning tool especially designed to allow tilting samples to ±90 deg while the entire stage is tilted to FIB angle using the FIB/SEMs sample stage. The ACT comprises four axes of motion: X (10 mm), Z (3 mm), rotation (unlimited), and tilt (±90 deg). After the ACT’s tilt axis has been centered under the electron beam, the region of interest can be moved into position, rotated to adjust the orientation, and lifted up to the tilt axis, allowing true eucentric tilt. This tilt axis can then itself be tilted using the microscope’s stage. In this manner it is possible to rock the sample back and forth on an axis that is perpendicular to the focussed ion beam while producing cross-sections or TEM slices. The tilting platform is fitted with a positional encoder with a resolution of 0.1 deg.
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The SuperFlat AFM combines the power of SEM and AFM. Information on lateral dimensions and material from in-situ inspection can be complemented by precise AFM topographical and frictional information. The effortless availability of these two sets of data is unique to such a system and opens new avenues of investigation and characterisation.
The most amazing feature of the SuperFlat AFM is its size. The tool is flat and compact enough to fit through the majority of SEM load-locks, allowing ease of use and increasing throughput. In addition, its size offers enormous stability and vibration dampening advantages, which are particularly attractive when using the tool ex-situ.
Design efforts also included ensuring easy handling and tip exchange. A sample or tip exchange takes only a minute and a tedious laser adjustment process is not required.