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The LEAP 5000 is CAMECA’s cutting-edge atom probe microscope, offering superior detection efficiency across a wide variety of metals, semiconductors and insulators: more than 40% extra atoms detected per nm3 analyzed.
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Building on 30 years of success in Atom Probe Tomography instrumentation and application, CAMECA has developed EIKOS™, the Atom Probe microscope for rapid alloy development and nanoscale materials research.
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Gigatome Polycut-Legacy
Large scale fully automated heavy-duty sledge microtome for histology and material sciences.
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Laser-Based Sample Preparation for Microstructure Diagnostics.
The microPREP™ PRO system was developed to provide efficient laser sample preparation fitted to the needs of microstructure diagnostics and failure diagnostics. Therefore, with microPREP™ PRO material samples can be prepared effectively and economically by using an ultra-short pulse laser.
microPREP™ PRO allows to create complex and 3D-shaped samples to enable more comprehensive analysis of certain structures like in advanced packages, such as through silicon vias (TSVs), or even complete systems-in-package (SiP).
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To meet the demands of viewing TEM holders using gas and liquid samples, we like to introduce the Chiaro to perform functions of leak check, E-Chips, hydrophilize sample surfaces and plasma clean.
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The MCA, a portable downstream plasma center for ex-situ specimen cleaning and in-situ e-beam chamber cleaning, employs ibss signature GV10x fitted into one convenient, wheeled S/S enclosure.
The MCA offers effective and reliable atomic radical ashing without sputtering or heat. The Asher is controlled by the latest ibss software installed on a Windows tablet or PC. For ex-situ sample cleaning and storage, the MCA includes a streamlined Cubic Chamber flexible enough to accommodate up to three TEM holders simultaneously. The MCA source is fitted with Qwk-SwitchTM Source mounting to facilitate Source transfer from the MCA to e-beam chambers.
The MCA prevents high resolution image degradation from SEM and TEM chamber contamination build-up in the gas phase and on chamber surfaces. For expeditious and uncomplicated hydrocarbon free samples and e-beam chambers, the Mobile Cubic DS Asher is an indispensable, cost-effective asset with ROI that can be less than six months.
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Acknowledged as the appropriate knife angle for routine sectioning of both biological and materials research specimens, it represents a balanced compromise between section quality and durability.
For the sectioning of a number of hard materials such as ceramics, semiconductors, oxides etc, with the use of the ultra 45° knife a longer service time may be expected. Kindly contact us and make use of our long years experience in all ultramicrotomy applications.
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The Anti Curtaining Table is a four-axis positioning tool especially designed to allow tilting samples to ±90 deg while the entire stage is tilted to FIB angle using the FIB/SEMs sample stage. The ACT comprises four axes of motion: X (10 mm), Z (3 mm), rotation (unlimited), and tilt (±90 deg). After the ACT’s tilt axis has been centered under the electron beam, the region of interest can be moved into position, rotated to adjust the orientation, and lifted up to the tilt axis, allowing true eucentric tilt. This tilt axis can then itself be tilted using the microscope’s stage. In this manner it is possible to rock the sample back and forth on an axis that is perpendicular to the focussed ion beam while producing cross-sections or TEM slices. The tilting platform is fitted with a positional encoder with a resolution of 0.1 deg.
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The SuperFlat AFM combines the power of SEM and AFM. Information on lateral dimensions and material from in-situ inspection can be complemented by precise AFM topographical and frictional information. The effortless availability of these two sets of data is unique to such a system and opens new avenues of investigation and characterisation.
The most amazing feature of the SuperFlat AFM is its size. The tool is flat and compact enough to fit through the majority of SEM load-locks, allowing ease of use and increasing throughput. In addition, its size offers enormous stability and vibration dampening advantages, which are particularly attractive when using the tool ex-situ.
Design efforts also included ensuring easy handling and tip exchange. A sample or tip exchange takes only a minute and a tedious laser adjustment process is not required.
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Performing in situ cryo TEM sample liftouts of site specific TEM slices prepared in cryo FIBs is in increasing demand.
Relying on our experience in manufacturing microgrippers for standard TEM sample preparation, we’ve designed a cryo-compatible version of the microgrippers that can be cooled to LN2 temperatures.
The gripper is mounted to an MM3A-EM that has been enhanced for use with the cryo gripper using an insulated holder. The insulation allows the micromanipulator to remain at room temperature while the gripper is cooled by connecting it to the microscope’s cryo-system.
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The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing on the 7 nm technology node – and beyond! In order to realize our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision – the MM4. The Prober Shuttle can be comprised of up to eight MM4s with the option of an ultra-flat two-axis or three-axis substage.
The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others.
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A range of compact tensile compression & bending stages for in-situ mounting within SEM chambers to observe dynamic changes to specimens under test.
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Discovering and Designing Advanced Materials With Ease
Combine imaging and analytical performance of a high resolution field emission scanning electron microscope (FE-SEM) with the processing ability of a next-generation focused ion beam (FIB). You may be working in a multi-user facility, as an academic or in an industrial lab. Take advantage of ZEISS Crossbeam’s modular platform concept and upgrade your system with growing needs. During milling, imaging or when performing 3D analytics Crossbeam will speed up your FIB applications.
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Your Dedicated Solutions for Automated Mineralogy.
Dedicated automated mineralogy systems from ZEISS are designed to run on any ZEISS SEM with multiple integrated EDX detectors.
Revolutionize your plant performance with field- and laboratory-based systems. Industry specific modules for the Oil and Gas and Mining industries allow you to quickly and simply interrogate your data, produce reports and gain unique insights.
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Revolutionize the Speed of Electron Microscopy.
With MultiSEM you unleash the acquisition speed of up to 91 parallel electron beams. Now, you can image samples in the centimeter – scale at nanometer resolution. This unique scanning electron microscope (SEM) is designed for continuous, reliable 24/7 operation. Simply set up your high-throughput data acquisition workflow and your MultiSEM will acquire high contrast images automatically, all by itself.
You control MultiSEM with the proven ZEN imaging software from ZEISS: all options of this powerful SEM are organized in an intuitive yet flexible way.